Semiconductor industry is moving towards the deep sub micron technology where the channel length of the device becomes as small as 65/40/32/28 nm and beyond. Fabrication of these smaller devices is a ...
Sponsored by Gatan, Inc.Reviewed by Olivia FrostDec 3 2025 Despite the use of modern, high-brightness probes and extremely efficient energy loss spectrometers, beam-sensitive materials pose a ...